Electron Microscopy Facility - SEM Overview
- Resolution: 0.8nm @ 15KV; 1.4nm @ 1 KV; 0.8nm @ 30KV (STEM mode)
- Probe current: 5 pA to 100nA
- Acceleration voltage: 0.02 V to 30 kV
- Magnification: 12 – 2,00,000 X
- Electron Emitter:Thermal (Schottky) field emission gun.
- Detection Modes
- In-lens Duo: Switchable between on-axis in-lens secondary electron detection for highest surface sensitivity and energy selective backscattered detection for advanced materials contrasts.
- Secondary Ion: High efficiency in-lens SE detector Everhart Thornley Secondary Electron detector
- Variable Pressure: High efficiency VPSE detector for pressure up to 60 Pa
- STEM: Low voltage optimized bright field, 4 quadrant dark field, and high angular dark field transmission imaging.
- EDAX for chemical composition analysis and element mapping.
- Cryo SEM and freeze fracture for imaging hydrated samples or for beam/vacuum sensitive specimens.
- Correlative Microscopy with Shuttle and Find.
- Specimen Stage: 5-Axes Motorized Eucentric Specimen Stage:X = 130mm; Y = 130mm; Z = 50mm; T = - 3º to 70º; R = 360º (continous)
- Chamber: 330mm(Ø) x 270mm(h) 15 accessory ports for various options including CCD-Camera with IR-illumination
- Vacuum system: High vacuum mode and variable pressure mode